Magnetoresistive film having reduced electric resistance

ABSTRACT

A soft magnetic layer is made of nickel iron alloy containing crystals of the face-centered cubic lattice and crystals of the body-centered cubic lattice. The face-centered cubic lattice serves to establish a soft magnetic property in the nickel iron alloy. The body-centered cubic lattice contributes to reduction in the electric resistance of the magnetoresistive film as well as to improvement of the magnetoresistive ratio of the magnetoresistive film. Even if the magnetoresistive film is further reduced in size, the magnetoresistive film can sufficiently be prevented from suffering from an increase in the temperature. Even if a sensing current of a larger current value is supplied to the magnetoresistive film, the magnetoresistive film is reliably prevented from deterioration in the characteristics as well as destruction.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a magnetoresistive film for use in aread head, for example, of a magnetic recording medium drive or storagedevice, such as a hard disk drive (HDD) and a magnetic tape drive.

2. Description of the Prior Art

A magnetoresistive film is widely used in a read head incorporated in anHDD, for example. When magnetic data is to be read in the HDD, a sensingcurrent is supplied to the magnetoresistive film. When themagnetoresistive film is exposed to the magnetic field leaking from arecording medium, voltage variation appears in the supplied sensingcurrent. Binary data can be discriminated from each other based on thevoltage variation A larger amplitude of the voltage variation ensures aconstant precise determination of magnetic data read out of a recordingmedium. An increased current value of the sensing current leads to anenlarged amplitude of the voltage variation.

In the field of HDDs, for example, a magnetoresistive film is requiredto get further reduced in size to achieve an increased recordingdensity. A magnetoresistive film of a reduced size tends to suffer froman excessive increase in the temperature due to its electric resistance.The increased temperature correspondingly induces a further increase inthe electric resistance of the magnetoresistive film, resulting indeteriorated characteristics as well as destruction of themagnetoresistive film. An enlarged voltage variation should accordinglybe achieved in a magnetoresistive film for use in a read head withoutsuffering from an excessive increase in the temperature.

SUMMARY OF THE INVENTION

Accordingly, it is an object of the present invention to provide a softmagnetic film largely contributing to establishment of amagnetoresistive film of a reduced electric resistance.

According to a first aspect of the present invention, there is provideda magnetoresistive film comprising a soft magnetic layer made of nickeliron alloy containing a crystal of the face-centered cubic lattice and acrystal of the body-centered cubic lattice.

The crystal of the face-centered cubic lattice serves to establish asoft magnetic property in the nickel iron alloy. At the same time, thecrystal of the body-centered cubic lattice contributes to reduction inthe electric resistance of the magnetoresistive film as well as toimprovement of the magnetoresistive (MR) ratio of the magnetoresistivefilm. Even if the magnetoresistive film is further reduced in size, themagnetoresistive film can sufficiently be prevented from suffering froman increase in the temperature. Even if a sensing current of a largercurrent value is supplied to the magnetoresistive film, themagnetoresistive film is reliably prevented from deterioration in thecharacteristics as well as destruction. A sensing current having alarger current value leads to an enlarged variation in the voltagedetected out of the magnetoresistive film. Magnetic data can constantlybe read out of a magnetic recording medium without any failure or error.The rate of the body-centered cubic lattice may be set smaller than therate of the face-centered cubic lattice in the soft magnetic layer ofthe magnetoresistive film. The nickel iron alloy may further containmetallic atoms other than the nickel and iron atoms.

According to a second aspect of the present invention, there is provideda magnetoresistive film comprising a soft magnetic layer made of nickeliron alloy containing iron 0.99 to 1.26 times as much as nickel byweight.

The iron of the predetermined amount causes generation of crystals ofthe body-centered cubic lattice in the soft magnetic layer of the nickeliron alloy. The body-centered cubic lattice contributes to reduction inthe electric resistance of the magnetoresistive film as well as toimprovement of the magnetoresistive (MR) ratio of the magnetoresistivefilm. As described above, even if the magnetoresistive film is furtherreduced in size, the magnetoresistive film can sufficiently be preventedfrom suffering from an increase in the temperature. Even if a sensingcurrent of a larger current value is supplied to the magnetoresistivefilm, the magnetoresistive film is reliably prevented from deteriorationin the characteristics as well as destruction. In particular, the nickeliron alloy preferably contains iron 0.99 to 1.26 times as much as nickelby weight. The nickel iron alloy may further contain metallic atomsother than the nickel and iron atoms.

The aforementioned magnetoresistive films may further include aferromagnetic layer laid over the soft magnetic layer. The soft magneticlayer and the ferromagnetic layer is allowed to serve as a freeferromagnetic layer in the magnetoresistive film. Alternatively, apinning layer may be laid over the soft magnetic layer. In this case,the magnetoresistive film may further include a pinned ferromagneticlayer laid over the pinning layer, a non-magnetic spacer layer laid overthe pinned ferromagnetic layer, and a free ferromagnetic layer laid overthe non-magnetic spacer layer. The free ferromagnetic layer may also bemade of nickel iron alloy containing a crystal of the face-centeredcubic lattice and a crystal of the body-centered cubic lattice in theaforementioned manner. The pinning layer may be an antiferromagneticlayer.

The mentioned magnetoresistive films may be mounted on a head sliderwhich is incorporated in a magnetic recording medium drive or storagedevice, such as a hard disk drive (HDD). Otherwise, the aforementionedsoft magnetic film as well as the combination of the soft magnetic filmand a ferromagnetic layer may be used for any purposes other than amagnetoresistive film.

BRIEF DESCRIPTION OF THE DRAWINGS

The above and other objects, features and advantages of the presentinvention will become apparent from the following description of thepreferred embodiments in conjunction with the accompanying drawings,wherein:

FIG. 1 is a plan view schematically illustrating an interior structureof a hard disk drive (HDD);

FIG. 2 is an enlarged perspective view showing a specific embodiment ofa flying head slider;

FIG. 3 is a front view schematically showing a read/writeelectromagnetic transducer;

FIG. 4 is an enlarged plan view showing a magnetoresistive (MR) readelement;

FIG. 5 is an enlarged front view schematically showing the structure ofa spin valve film according to a first embodiment of the presentinvention;

FIG. 6 is an enlarged front view schematically showing the structure ofa spin valve film according to a second embodiment of the presentinvention;

FIG. 7 is a graph showing the correlation between the ratio of iron tonickel by weight and the resistance as well as the MR ratio; and

FIG. 8 is a phase diagram for nickel iron alloy.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

FIG. 1 schematically shows an interior structure of a hard disk drive(HDD) 11 as a specific example of a magnetic recording medium drive orstorage device. The HDD 11 includes a box-shaped primary enclosure 12which defines an inner space of a flat parallelepiped, for example. Atleast one magnetic recording disk 13 is accommodated as a recordingmedium in the inner space. The magnetic recording disk 13 is mounted onthe driving shaft of a spindle motor 14. The spindle motor 14 can drivethe magnetic recording disk 13 so as to rotate at a high revolution ratesuch as 7,200 rpm or 10,000 rpm, for example. A cover, not shown, iscoupled to the primary enclosure 12 so as to define the closed innerspace.

A carriage 16 is also accommodated in the inner space of the primaryenclosure 12. The carriage 16 is designed to swing around a verticalsupport shaft 15 The carriage 16 has a rigid swing arm 17 extendinghorizontally from the support shaft 15, and an elastic head suspension18 fixed to the tip end of the swinging arm 17. The elastic headsuspension 18 extends forward from the swinging arm 17. Asconventionally known, a flying head slider 19 is cantilevered at the tipend of the elastic head suspension 18 by a gimbal spring, not shown. Theelastic head suspension 18 urges the flying head slider 19 toward thesurface of the magnetic recording disk 13. When the magnetic recordingdisk 13 rotates, airflow is generated along the surface of the magneticrecording disk 13. The airflow serves to generate a lift on the flyinghead slider 19. The lift is balanced with the urging force from theelastic head suspension 18. The flying head slider 19 is thus allowed tokeep flying with a relatively high stability when the magnetic recordingdisk 13 rotates.

When the carriage 16 is driven to swing around the support shaft 15during flight of the flying head slider 19, the flying head slider 19 isallowed to cross the surface of the magnetic recording disk 13 in theradial direction. The radial movement brings the flying head slider 19above a target recording track on the magnetic recording disk 13. Inthis case, an electromagnetic actuator 21, such as a voice coil motor(VCM), may be employed to achieve the swinging movement of the carriage16. In the case where two or more magnetic recording disks 13 areincorporated into the inner space of the primary enclosure 12, a pair ofelastic head suspensions 18, namely, the flying head sliders 19 aredisposed between the adjacent magnetic recording disks 13, asconventionally known.

FIG. 2 shows a specific example of the flying head slider 19. The flyinghead slider 19 includes a slider body 22 made of Al₂O₃-TiC in the formof a flat parallelepiped. A head protection layer 24 made of Al₂O₃ iscoupled to the outflow or trailing end of the slider body 22. The headprotection layer 24 has a read/write electromagnetic transducer 23. Amedium-opposed surface or bottom surface 25 is defined over the sliderbody 22 and the head protection layer 24 so as to face the magneticrecording disk 13. The bottom surface 25 receives an airflow 26 causedby the rotation of the magnetic recording disk 13.

A pair of rails 27 is formed on the bottom surface 25, extending fromthe inflow or leading end to the trailing or downstream end. Each rail27 has an air bearing surface (ABS) 28 on its top surface, where theaforementioned lift is generated by the airflow 26. The leading end ofthe read/write electromagnetic transducer 23, which is embedded in thehead protection layer 24, is exposed out of the ABS 28, as describedlater in detail. The exposed end of the read/write electromagnetictransducer 23 may be covered with a diamond-like carbon (DLC) protectionfilm covering over the ABS 28. The flying head slider 19 may take anyshape other than the above-described one.

FIG. 3 shows the bottom surface 25 in detail. The read/writeelectromagnetic transducer 23 is formed as a composite thin filmmagnetic head. Specifically, the read/write electromagnetic transducer23 includes a magnetoresistive (MR) read element 31 and an inductivewrite element or a thin film magnetic head 32. As conventionally known,the MR read element 31 can detect bit data by utilizing variation in theelectric resistance caused by the magnetic field acting from themagnetic recording disk 13. The inductive write element 32 can write bitdata into the magnetic recording disk 13 by utilizing a magnetic fieldinduced by an electrically-conductive coil pattern, not shown, forexample.

The MR read element 31 is interposed between a pair of upper and lowernon-magnetic gap layers 33, 34 The non-magnetic gap layers 33, 34 may bemade of Al₂O₃, for example. The non-magnetic gap layers 33, 34interposing the MR read element 31 are together interposed between upperand lower shield layers 35, 36. The upper and lower shield layers 35, 36may be made of FeN or NiFe, for example. The lower shield layer 36extends over the surface of an Al₂O₃ (alumina) film 37. The alumina film37 functions as an undercoat film or the lower half of theaforementioned head protection layer 24.

The inductive write element 32 includes a non-magnetic gap layer 38extending over the surface of the upper shield layer 35. Thenon-magnetic gap layer 38 may be made of Al₂O₃,for example. The uppershield layer 35 is opposed to an upper magnetic pole layer 39. Thenon-magnetic gap layer 38 intervenes between the upper shield layer 35and the upper magnetic pole layer 39. The upper magnetic pole layer 39may be made of NiFe, for example. The upper magnetic pole layer 39 iscovered with an Al₂O₃ (alumina) film 40 spreading over the surface ofthe non-magnetic gap layer 38. The alumina film 40 serves to hold the MRread element 31 and the inductive write element 32 against theaforementioned alumina film 37. The alumina film 40 functions as anovercoat or the upper half of the head protection layer 24.

The upper magnetic pole layer 39 and the upper shield layer 35 togetherconstitute the magnetic core of the inductive write element 32.Specifically, the upper shield layer 35 of the MR read element 31 servesas the lower magnetic pole layer of the inductive write element 32. Whena magnetic field is induced at an electrically-conductive coil pattern,magnetic flux is caused to circulate through the upper magnetic polelayer 39 and the upper shield layer 35. The non-magnetic gap layer 38serves to leak the circulated magnetic flux from the bottom surface 25.The leaked magnetic flux forms a magnetic field for recordation. Itshould be noted that the upper shield layer 35 of the MR read element 31may be formed independent of the lower magnetic pole layer of theinductive write element 32.

Referring also to FIG. 4, the MR read element 31 includes amagnetoresistive (MR) film or a spin valve film 41 laid over the surfaceof a non-magnetic gap layer 34. The spin valve film 41 is designed toextend along the ABS 28. The spin valve film 41 has a pair of endsurfaces extending along planes intersecting the surface of thenon-magnetic gap layer 34 at an inclined angle θ.

Likewise, a pair of domain control stripe layers 42 are formed over thenon-magnetic gap layer 34, extending along the ABS 28. The domaincontrol stripe layers 42 interpose the spin valve film 41 over thenon-magnetic gap layer 34 along the ABS 28. The tip ends of the domaincontrol stripe layers 42 contact the corresponding end surfaces of thespin valve film 41. The domain control stripe layer 42 may be made of ahard magnetic metallic material such as CoPt, CoCrPt, or the like.

Lead layers 43 are laid over the surface of the respective domaincontrol stripe layers 42. The lead layers 43 are interposed between thedomain control stripe layers 42 and the upper shield layer 35. The frontends of the respective lead layers 43 contact the respective endsurfaces of the spin valve films 41 via the domain control stripe layers42. A sensing current is supplied through the lead layers 43 to the spinvalve film 41. The lead layer 43 may be made of material, such as Cu,which has a high electric conductivity.

As is obvious from FIG. 4, the respective lead layers 43 are designed toextend rearward over the surface of the non-magnetic gap layer 34 fromthe front ends exposed at the ABS 28. Terminal pads 44 are individuallyconnected to the rear ends of the respective lead layers 43. Theterminal pads 44 may extend over the surface of the lead layers 43. Theterminal pads 44 are connected to terminal pads, not shown, on theelastic head suspension 18 through Au balls, not shown, for example,when the flying head slider 19 is fixed to the elastic head suspension18.

FIG. 5 shows the spin valve film 41 according to a first embodiment ofthe present invention. The spin valve film 41 has a layered structureincluding a basement layer 45 laid over the surface of the non-magneticgap layer 34. The basement layer 45 may be made of a Ta layer, forexample.

A free ferromagnetic layer 47 is laid over the surface of the basementlayer 45. The free ferromagnetic layer 47 includes a NiFe layer 47 alaid over the surface of the basement layer 45, and a CoFeBferromagnetic layer 47 blaid over the surface of the NiFe layer 47 a.The NiFe layer 47 a contains crystals of the face-centered cubic lattice(fcc) and crystals of the body-centered cubic lattice (bcc). The rate ofthe crystals of the body-centered cubic lattice is set smaller than therate of the crystals of the face-centered cubic lattice in the NiFelayer 47 a. Unless the rate of the crystals of the body-centered cubiclattice exceeds the rate of the crystals of the face-centered cubiclattice, the NiFe 47 a is allowed to enjoy a soft magnetic property. TheNiFe layer 47 a may have a thickness equal to or larger than 160 nmapproximately. The CoFeB ferromagnetic layer 47 b has a soft magneticproperty.

A non-magnetic spacer layer 48 is laid over the free ferromagnetic layer47. The non-magnetic spacer layer 48 may be made of anelectrically-conductive metallic material such as Cu. A pinnedferromagnetic layer 49 is laid over the non-magnetic spacer layer 48.The pinned ferromagnetic layer 49 may have a multilayered structure, forexample, including a pair of CoFeB layers 49 a, 49 b. The CoFeB layers49 a, 49 b may interpose a coupling layer 49 c such as a Ru layer. Thepinned ferromagnetic layer 49 has a soft magnetic property. It should benoted that the pinned ferromagnetic layer 49 may be made of othermaterials.

A pinning layer 51 is laid over the surface of the pinned ferromagneticlayer 49. The pinning layer 51 may be made of an antiferromagneticmaterial, such as PdPtMn, FeMn, or the like. Alternatively, the pinninglayer 51 may be made of any hard magnetic material. The pinning layer 51serves to fix the magnetization of the pinned ferromagnetic layer 49 ina predetermined direction. A protection layer 52 may be laid over thesurface of the pinning layer 51. The protection layer 52 may include aCu layer 52 a and a cap layer or a Ta layer 52 b formed over the Culayer 52 a.

When the MR read element 31 is opposed to the surface of the magneticrecording disk 13, the magnetization of the free ferromagnetic layer 47is caused to rotate in the spin valve film 41 depending on the polarityof the magnetic field acting from the magnetic recording disk 13, asconventionally known. The rotating magnetization of the freeferromagnetic layer 47 causes the electric resistance of the spin valvefilm 41 to vary significantly. When a sensing current is supplied to thespin valve film 41 through the lead layers 43, the level of the electricsignal detected from the lead layers 43 varies in response to thevariation in the electric resistance. The variation of the level isutilized to determine bit data.

The aforementioned NiFe layer 47 a serves to reduce the electricresistance of the spin valve film 41. Even if the spin valve film 41 isfurther reduced in size, the spin valve film 41 can sufficiently beprevented from suffering from an increase in the temperature. Even if asensing current of a larger current value is supplied to the spin valvefilm 41, the spin valve film 41 is reliably prevented from deteriorationin the characteristics as well as destruction. A sensing current havinga larger current value leads to an enlarged variation in the voltagedetected out of the terminal pads 44. Magnetic data can constantly beread out of the magnetic recording disk 13 without any failure or error.

The inventor has verified the characteristics of the spin valve film 41.The inventor has sequentially formed a Ta layer, a NiFe layer 47 a , aCoFeB layer 47 b , a Cu layer, a CoFeB layer, a Ru layer, a CoFeB layer,a PdPtMn layer, a Cu layer and a Ta layer, each having a predeterminedthickness, over a wafer in the vacuum atmosphere. Sputtering wasemployed to form the layers. When the NiFe layer 47 a is deposited, thealloy mass of Ni₅₀Fe₅₀ (wt%) was used as the target of the sputtering.The ratio by weight was actually set at 1:1.08 approximately between thenickel and the iron in the resulting NiFe layer 47 a . The NiFe layer 47a of Ni₄₈Fe₅₂ was obtained. After the layers were deposited, the PdPtMnlayer was subjected to a heat treatment so that the PdPtMn layer gotregularized. A specific example of the spin valve film 41 was formed inthis manner. The inventor measured the electric resistance or aso-called sheet resistance ρ/t[Ω], the magnetoresistive (MR) ratio [%],the magnetic coupling field (of the pinning performance) Hua[kA/m], andthe magnetic coupling field Hin[A/m], of the resulting spin valve film41.

The inventor also prepared a spin valve film of a comparative example.The comparative example was formed in the manner described above, exceptthat the alloy mass of Ni₇₇Fe₂₃ (wt%) was employed as the target of thesputtering when the NiFe layer was deposited. The ratio by weight wasactually set at 3:1 approximately between the nickel and the iron in theresulting NiFe layer. The NiFe layer of Ni₇₅Fe₂₅ was obtained. Theinventor likewise measured the sheet resistance ρ/t[Ω], themagnetoresistive (MR) ratio [%], the magnetic coupling field (of thepinning performance) Hua[kA/m], and the magnetic coupling fieldHin[A/m], of the resulting spin valve film of the comparative example.TABLE 1 Fe/Ni ρ/t MR Ratio Hua Hin by weight [Ω] [%] [kA/m] [A/m]Invention 1.08 10.6 12.2 101.5 238.7 Compared Example 0.33 11.8 8.4 82.6517.3

As is obvious from Table 1, the electric resistance ρ/t was reduced inthe spin valve film 41 of the embodiment as compared with the spin valvefilm of the comparative example. Moreover, the spin valve film 41 of theembodiment enjoyed a superior MR ratio as compared with the spin valvefilm of the comparative example. Similarly, a good magnetic couplingfield Hua was observed in the spin valve film 41 of the embodiment ascompared with the spin valve film of the comparative example. It hasbeen confirmed that a sufficient magnetic coupling was establishedbetween the antiferromagnetic layer and the pinned ferromagnetic layer.The magnetic coupling field Hin was largely reduced.

It should be noted that metallic atoms such as Ir, Ru, Cr, or the like,may be added to the NiFe layer 47 a at a rate smaller than 50 at% in theaforementioned spin valve film 41. Reduction in the electric resistanceρ/t and improvement of the MR ratio have been observed in the spin valvefilm 41 of the embodiment in spite of the addition of these metallicatoms.

FIG. 6 shows the spin valve film 41 a according to a second embodimentof the present invention. The spin valve film 41 a has a layeredstructure including a free ferromagnetic layer below a pinnedferromagnetic layer. Specifically, the spin valve film 41 a has abasement layer 55 laid over the surface of the non-magnetic gap layer34. The basement layer 55 may include a Ta layer 55 a and a nickel ironalloy layer (NiFe layer) 55 b laid over the Ta layer 55 b. The NiFelayer 55 b contains crystals of the face-centered cubic lattice andcrystals of the body-centered cubic lattice. The rate of thebody-centered cubic lattice is set smaller than the rate of theface-centered cubic lattice in the NiFe layer 55 b. Unless the rate ofthe body-centered cubic lattice exceeds the rate of the face-centeredcubic lattice, the NiFe 55 b is allowed to enjoy a soft magneticproperty. The NiFe layer 55 b may have a thickness equal to or largerthan 160 nm approximately.

A pinning layer 56 is laid over the surface of the basement layer 55.The pinning layer 56 may be made of an antiferromagnetic material suchas PdPtMn, FeMn, for example. Alternatively, the pinning layer 56 may bemade of any hard magnetic material. A pinned ferromagnetic layer 57 islaid over the surface of the pinning layer 56. The pinned ferromagneticlayer 57 may be made of a ferromagnetic material, such as CoFeB, forexample. The pinning layer 56 serves to fix the magnetization of thepinned ferromagnetic layer 57 in a predetermined direction.

A non-magnetic spacer layer 58 is laid over the surface of the pinnedferromagnetic layer 57. The non-magnetic spacer layer 58 may be made ofan electrically-conductive metallic material such as Cu, for example. Afree ferromagnetic layer 59 is laid over the surface of the non-magneticspacer layer 58. The free ferromagnetic layer 59 may include a CoFeBlayer 59 a laid over the surface of the non-magnetic spacer layer 58 anda NiFe layer 59 b laid over the CoFeB layer 59 a . The NiFe layer 59 bmay contain crystals of the face-centered cubic lattice and crystals ofthe body-centered cubic lattice in the same manner as described above.The surface of the free ferromagnetic layer 59 may be covered with aprotection layer 61. The protection layer 61 may include a Cu layer 61 aand a cap layer or a Ta layer 61 b laid over the Cu layer 61 a.

The inventor has verified the characteristics of the spin valve film 41a. The inventor has sequentially formed a Ta layer, a NiFe layer 55 b, aPdPtMn layer, a CoFeB layer, a Cu layer, a CoFeB layer, a NiFe layer, aCu layer and a Ta layer, each having a predetermined thickness, over awafer in the vacuum atmosphere. Sputtering was employed to form thelayers. After the layers were deposited, the PdPtMn layer was subjectedto a heat treatment so that the PdPtMn layer got regularized. Theinventor measured the sheet resistance ρ/t[Ω] as well as themagnetoresistive (MR) ratio [%], of the resulting spin valve film 41 a.In particular, the inventor has prepared some examples of the spin valvefilm 41 a. The ratio of iron to nickel by weight was differently set inthe individual examples.

As is obvious from FIG. 7, the electric resistance ρ/t was reduced inthe spin valve film 41 a if the NiFe layer 55 b contains the ironapproximately 0.3 to 1.15 times as much as the nickel by weight.Moreover, improvement of the MR ratio was also observed in the spinvalve film 41 a. The inventor also has reviewed the result of FIG. 7referring also to the phase diagram of the nickel iron alloy. Theinventor has found that the reduction in the electric resistance as wellas the improvement of the MR ratio depends upon the ratio of thebody-centered cubic lattice within the nickel iron alloy. As is apparentfrom FIG. 8, crystals of the body-centered cubic lattice start to appearin the nickel iron alloy when the rate of the iron atoms exceeds 29 at%,equivalent to 0.39 wt% for the ratio of the iron to the nickel byweight. An increased weight in the nickel iron alloy leads to anincreased amount of the body-centered cubic lattice. Based on the Curietemperature Tc of the (γFe, Ni), when the rate of the iron atoms exceeds57 at%, equivalent to 1.26 wt% for the ratio of the iron to the nickelby weight, the body-centered cubic lattice gets dominant over theface-centered cubic lattice of FeNi₃. In this condition, the Curietemperature Tc remains constant irrespective of the further increasedratio of the iron by weight. Based on the comparison between FIGS. 7 and8, the rate of the iron atoms ranging between 29 at% and 57 at% (between0.39 wt% and 1.26 wt%) is expected to achieve reduction in the electricresistance as well as improvement of the MR ratio in the spin valve film41, 41 a. In particular, the rate of the iron atoms ranging between 51at% and 57 at% (between 0.99 wt% and 1.26 wt%) is expected to achievereduction in the electric resistance as well as improvement of the MRratio in the spin valve film 41, 41 a.

1. A magnetoresistive film comprising: a free ferromagnetic layerincluding nickel iron alloy layer containing a crystal of face-centeredcubic lattice and a crystal of body-centered lattice.
 2. Themagnetoresistive film according to claim 1, further comprising: anon-magnetic spacer layer laid over the free ferromagnetic layer; apinned ferromagnetic layer laid over the non-magnetic spacer layer; anda pinning layer laid over the pinned ferromagnetic layer.
 3. Themagnetoresistive film according to claim 1, wherein rate of thebody-centered cubic lattice is set smaller than rate of theface-centered cubic lattice in the soft magnetic layer.
 4. Themagnetoresistive film according to claim 1, wherein said freeferromagnetic layer further includes a ferromagnetic layer laid over thenickel iron alloy layer.
 5. The magnetoresistive film according to claim2, wherein the pinning layer comprises an antiferromagnetic layer. 6.The magnetoresistive film according to claim 1, wherein the nickel ironalloy layer contains a metallic atom other than nickel and iron atoms.7. A magnetoresistive film comprising: a soft magnetic layer made ofnickel iron alloy containing iron 0.39 to 1.26 times as much as nickelby weight.
 8. The magnetoresistive film according to claim 7, whereinthe nickel iron alloy contains iron 0.99 to 1.26 times as much as nickelby weight.
 9. The magnetoresistive film according to claim 7, wherein aferromagnetic layer is laid over the soft magnetic layer.
 10. Themagnetoresistive film according to claim 9, wherein the soft magneticlayer and the ferromagnetic layer constitute a free ferromagnetic layer.11. The magnetoresistive film according to claim 7, wherein a pinninglayer is laid over the soft magnetic layer.
 12. The magnetoresistivefilm according to claim 11, wherein the pinning layer comprises anantiferromagnetic layer.
 13. The magnetoresistive film according toclaim 11, further comprising: a pinned ferromagnetic layer laid over thepinning layer; a non-magnetic spacer layer laid over the pinnedferromagnetic layer; and a free ferromagnetic layer laid over thenon-magnetic spacer layer, wherein the free ferromagnetic layer is madeof nickel iron alloy containing a crystal of face-centered cubic latticeand a crystal of body-centered cubic lattice.
 14. The magnetoresistivefilm according to claim 7, wherein the nickel iron alloy contains ametallic atom other than nickel and iron atoms.
 15. A head slidercomprising: a slider body; and a read head disposed on the slider bodyand including a magnetoresistive film, wherein the magnetoresistive filmcontains a soft magnetic layer made of nickel iron alloy, said nickeliron alloy including a crystal of face-centered cubic lattice and acrystal of body-centered cubic lattice.
 16. The head slider according toclaim 15, wherein rate of the body-centered cubic lattice is set smallerthan rate of the face-centered cubic lattice in the soft magnetic layer.17. A soft magnetic film made of nickel iron alloy containing a crystalof face-centered cubic lattice and a crystal of body-centered cubiclattice.
 18. The soft magnetic film according to claim 17, wherein rateof the body-centered cubic lattice is set smaller than rate of theface-centered cubic lattice.
 19. The soft magnetic film according toclaim 18, wherein the nickel iron alloy contains iron 0.39 to 1.26 timesas much as nickel by weight.
 20. The soft magnetic film according toclaim 9, wherein the nickel iron alloy contains iron 0.99 to 1.26 timesas much, as nickel by weight.